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Comparison of Cleanroom Standards

Comparison of Cleanroom Standards
Jaime Graymead
May 26, 2020

TECHNICAL BULLETIN: Comparison of Cleanroom Standards
Date: 12th October 2011

ISO 14644-1 counts mer m3 per size and greater

Class0.1 μm0.2 μm0.3 μm0.5 μm1 μm5 μm10 μm25 μm
1102
210024104
31000237102358
410000370102035283
51000002370010200352083229
61000000237000102000352008320293
7352000832002930
8352000083200029300
983200000293000

US FED 209E (superceded) – counts mer m3 per size and greater

S.I.English0.1 μm0.2 μm0.3 μm0.5 μm1 μm5 μm10 μm25 μm
M135075.530.910
M1.51214026510635.3
M23500757309100
M2.5101240026501060353
M335000757030901000
M3.510026500106003530
M4757003090010000
M4.5100035300247
M5100000618
M5.5100003530002470
M610000006180
M6.5100000353000024700
M71000000061800

BS 1989 (superceded) – counts mer m3 per size and greater

Class0.1 μm0.2 μm0.3 μm0.5 μm1 μm5 μm10 μm25 μm
C100350
D10003500
E1000035000
F35000
G100000350002000
H350002000
J35000020004500
K3500000200004500500
L200000450005000
M45000050000

European Union GMP Guideline – counts mer m3 per size and greater

ClassAt Rest 0.5 μmAt Rest 5 μmIn Operation 0.5 μmIn Operation 5 μm
A3500035000
B350003500002000
C35000020003500000020000
D350000020000N/AN/A
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